Sensing characteristics of hematite and barium oxide doped hematite films towards ozone and nitrogen dioxide
Debliquy, M; Baroni, C; Boudiba, A; Tulliani, JM; Olivier, M; Zhang, C
| HERO ID | 1535718 |
|---|---|
| Year | 2011 |
| Title | Sensing characteristics of hematite and barium oxide doped hematite films towards ozone and nitrogen dioxide |
| Book Title | Procedia Engineering |
| Authors | Debliquy, M; Baroni, C; Boudiba, A; Tulliani, JM; Olivier, M; Zhang, C |
| Volume | 25 |
| Abstract | Hematite (alpha-Fe2O3) and barium oxide doped hematite (BaO-Fe2O3) thin films were investigated as ozone (O-3) and nitrogen dioxide (NO2) sensing materials. Fe2O3 and BaO-Fe2O3 films were deposited by radio-frequency sputtering using pure Fe2O3, and 1-2% BaO doped Fe2O3 targets. The 700 degrees C (1 hour) annealed films showed significant responses to O-3 at temperatures ranging from 150 degrees C to 300 degrees C. Although, hematite is an n-type semiconductor, the Fe2O3 and BaO-Fe2O3 films exhibit p-type behavior to O-3 and n-type behavior to NO2 at the studied concentration ranges in this work. The response to oxidizing gases is not strictly an increase in resistance due to a conversion from n-type to p-type depending on gas concentrations. This effect is more visible with increasing Ba concentration. (C) 2011 Published by Elsevier Ltd. |
| Doi | 10.1016/j.proeng.2011.12.054 |
| Wosid | WOS:000300512400052 |
| Is Certified Translation | No |
| Dupe Override | No |
| Comments | Source: Web of Science WOS:000300512400052 Journal:EUROSENSORS XXV 1877-7058 |
| Is Public | Yes |
| Keyword | iron oxide; gas sensor; sputtering; O-3; NO2 |